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采用11B(p,α0)8Be核反应分析了B+注入锡青铜样品中的纵向浓度分布.该分布具有较宽的高浓度峰,表明样品表面可形成优良的改性层.讨论了提高核反应分析法深度分辨率的主要因素,指出减小入射质子束的能量分散度、提高探测系统的能量分辨率及增大B+的能损因子,是提高深度分辨率的主要途径.
The longitudinal concentration distribution in B + implanted tin bronze samples was analyzed using 11B (p, α0) 8Be nuclear reaction. The distribution has a broad high concentration peak, indicating that the sample surface can form an excellent modified layer. The main factors to improve the depth resolution of the nuclear reaction analysis method are discussed. It is pointed out that decreasing the energy dispersion of the incident proton beam, increasing the energy resolution of the detection system and increasing the energy loss factor of B + are the main ways to improve the depth resolution.