论述了以X-1280Y LiNbO3(铌酸锂)作为基底材料的声表面波力传感器的输入换能器和输出换能器的设计,并对其性能进行测试分析。其中输入换能器采用余弦平方函数进行加权设计,输出换能器采用均匀换能器。在制作成品后,对其性能进行实验测量,并对实验数据进行分析,发现所施加的张力与频率漂移之间的线性度很好,误差为1%左右。 The design of the input transducers and output transducers of the surface acoustic wave force transducer based on X-1280Y LiNbO3 (lithium niobate) is discussed. The performance of the transducer is tested and analyzed. The input transducer is weighted by the cosine square function, and the output transducer adopts a uniform transducer. After the finished product was made, its performance was measured experimentally, and the experimental data were analyzed. The linearity between the applied tension and the frequency drift was found to be very good, with an error of about 1%.