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为了实现对MEMS变形反射镜的静态形貌、动态离面变形及谐振频率的测量,提出了一种基于计算机控制的频闪显微干涉测量系统。测试中采用频闪照明技术及5步相移技术实现了对干涉相位的测量,利用空间及时间相位解缠算法恢复了反映物体真实信息的连续相位,从而得到了所需的特性参数。实验结果表明:该系统具有测量简便、自动化程度高及测量精度高等特点。
In order to realize the static topography, dynamic out-of-plane deformation and resonance frequency measurement of MEMS deformable mirror, a computer-controlled stroboscopic microscopic interferometry system is proposed. In the test, stroboscopic illumination technology and 5-step phase shift technique are used to measure the interferometric phase. The phase and phase unwrapping algorithms are used to recover the continuous phase reflecting the true information of the object, and the required characteristic parameters are obtained. The experimental results show that the system has the advantages of simple measurement, high degree of automation and high measurement accuracy.