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介绍了扫描近场光学显微镜中基于剪切力的样品、探针间距离控制的方法。当受振动激励的光纤探针由远处逐渐接近样品表面时,样品与针尖间的剪切力使针尖的振动振幅减小,通过检测探针振幅的变化从而控制针尖与样品间的距离。此种方法可以方便地将光纤探针导入工作区域内并在扫描过程中保持适当的高度。我们测量了探针系统的幅频特性和力曲线,并用该方法获得4μm×4μm的范围内光盘表面的形貌信息。
The method of controlling the distance between probes based on shear force in scanning near field optical microscope is introduced. When the vibration-excited fiber probe approaches the sample surface from a distance, the shear force between the sample and the tip decreases the vibration amplitude of the tip, and the distance between the tip and the sample is controlled by detecting the change of the probe amplitude. This method allows easy introduction of the fiber probe into the work area and maintains the proper height during the scan. We measured the amplitude-frequency characteristic and force curve of the probe system and used this method to obtain the topography information of the disc surface in the range of 4μm × 4μm.