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YY—1型亚微压人仪是我们开发成功的、用于研究材料表面亚微米级膜层力学性能的高灵敏度、高精度仪器。它主要由测试台及以微型计算机为核心的电气控制系统组合而成。本文主要介绍在其研制过程中遇到的诸多关键技术问题,如微力产生、微位移测量、振动及温度影响、压头与样品表面接触判定、数据采集等。
YY-1 sub-micro-pressure manometer is a high-sensitivity and high-precision instrument that we have successfully developed to study the mechanical properties of submicron film on the surface of materials. It is mainly composed of test benches and microcomputer-based electrical control system. This article mainly introduces many key technical problems encountered in its development process, such as micro-force generation, micro-displacement measurement, vibration and temperature effects, indenter and sample surface contact determination, data acquisition and so on.