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考虑声表面波驱动器直接驱动工作物体,能量损失小,传动误差小,且尺寸小,噪声低,抗电磁干扰等特点,基于MEMS技术并采用在Li NbO3基底上加工微型电极的方式制作了一种声表面波微驱动器。为了更加有效地控制驱动方向,提出了一种新型叉指结构,即浮动电极型单向换能器,然后利用ANSYS软件,对声表面波换能器进行了优化设计和分析,制作出了孔径尺寸为5mm,电极厚度为0.8μm,指宽为6.7μm,周期为80μm的浮动电极型单向换能器。该声表面波驱动器比以往的驱动器具有更高的谐振频率(接近50MHz)和更有效的方向可控性,从而有助于微光学控制系统的进一步微型化和可控化。
Considering the direct driving of the work object by the SAW driver, small energy loss, small transmission error, small size, low noise and anti-electromagnetic interference, a microelectrode based LiTiO3 substrate was fabricated based on the MEMS technology SAW micro-drive. In order to control the driving direction more effectively, a new type of interdigital transducer is proposed, which is the floating electrode type unidirectional transducer. Then the ANSYS software is used to optimize the SAW transducer design and analysis, and the aperture A floating electrode type unidirectional transducer having a size of 5 mm, an electrode thickness of 0.8 μm, a finger width of 6.7 μm and a period of 80 μm. The SAW driver has a higher resonant frequency (closer to 50MHz) and more effective direction control than the conventional driver, thereby contributing to further miniaturization and controllability of the micro-optical control system.