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介绍了一种新型硅集成微型泵系统的工作原理、结构优化、电路设计、制作工艺流程和初步的实验结果。该系统为三片式结构，其中两片由体硅微机械加工技术形成，构成微止回阀门，另一片为集成铝硅双金属驱动结构。驱动结构的结构参数得到了优化设计，提高了工作效率。利用铝硅双金属驱动结构制作工艺的特点，在驱动结构上集成制作了微流量传感器和信号处理电路，实现了系统集成。该集成系统的制作工艺简单，所采用的微机械加工工艺与标准ＭＯＳ工艺完全兼容。集成微型泵的外形尺寸为６ｍｍ×６ｍｍ×１ｍｍ，最大输出背压力为１０ｋＰａ，最大流量可达到４４μＬ／ｍｉｎ。
The working principle, structure optimization, circuit design, manufacturing process and preliminary experimental results of a new type of silicon integrated micropump system are introduced. The system is a three-piece structure, two of which are formed by bulk silicon micromachining technology to form micro-check valves and the other is an integrated aluminum-silicon-bimetallic drive structure. The structural parameters of the drive structure have been optimized to improve work efficiency. Utilizing the characteristics of aluminum-silicon bimetallic driving structure manufacturing process, micro-flow sensor and signal processing circuit are integrated on the driving structure to realize the system integration. The integrated system has a simple manufacturing process and the micromachining process used is fully compatible with the standard MOS process. Integrated micro-pump dimensions of 6mm × 6mm × 1mm, the maximum output back pressure of 10kPa, the maximum flow rate can reach 44μL / min.