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悬空金属微条是探测高能粒子和X射线的新型探测器──微条气体室的探测元件。由微细加工制备的金属微条尺寸及其相互的位置精度都可控制在微米量级,因此能够得到非常好的空间分辨率,并具有抗辐射、低成本等独特优点。
Suspended metal microstrip is a new detector for detecting energetic particles and X-rays - a sensing element for a microstrip gas chamber. The size of the metal micro-strips prepared by the microfabrication and their mutual positional precision can be controlled on the order of micrometers, so that very good spatial resolution can be obtained, and the unique advantages of radiation resistance and low cost are achieved.