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以Bi(NO3)3·5H2O和Ti(OC4H9)4为原料,采用自组装单层膜技术,在负载有功能化三氯十八烷基硅烷(octadecyl-trichloro-silane,OTS)的FTO基板上制备了Bi2Ti2O7薄膜。基板表面的亲水性测试表明,紫外照射使OTS自组装单层膜表面由疏水转变为亲水,实现功能化。借助X射线衍射(XRD)、X射线能量色散谱(EDS)、扫描电子显微镜(SEM)和原子力显微镜(AFM)分析分别对Bi2Ti2O7薄膜的组成、结构和微观形貌进行了表征。结果表明,沉积溶液浓度为0.02 mol·L-1时,所得Bi2Ti2O7薄膜均匀致密。560℃热处理1 h、厚度为0.4μm的Bi2Ti2O7薄膜在100 kHz的介电常数为153,介电损耗为0.089。
Using Bi (NO3) 3 · 5H2O and Ti (OC4H9) 4 as raw materials, self-assembled monolayers were fabricated on FTO substrates loaded with functionalized octadecyl-trichloro-silane Bi2Ti2O7 thin films were prepared. Hydrophilicity tests on the substrate surface show that UV irradiation can make the surface of OTS self-assembled monolayer change from hydrophobic to hydrophilic to realize functionalization. The composition, structure and morphology of Bi2Ti2O7 thin films were characterized by XRD, XRD, SEM and AFM. The results show that the Bi2Ti2O7 thin film is uniform and compact when the deposition concentration is 0.02 mol·L-1. Heat treatment at 560 ℃ for 1 h, the thickness of 0.4μm Bi2Ti2O7 film dielectric constant at 100 kHz of 153, the dielectric loss of 0.089.