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本文提出了ＩＣＰ－ＭＳ内标补偿校正法直接测定５Ｎ～６Ｎ高纯氧化镁中１４种痕量稀土杂质的方法，研究了ＩＣＰ－ＭＳ测定的谱干扰和基体效应。考察了Ｒｈ、Ｇａ、Ｉｎ、Ｃｓ作为内标元素的补偿校正作用，选用Ｉｎ内标有效地消除氧化铬（ｇ／Ｌ）的基体效应。标准加入回收为９２～１０６％，ＲＳＤ（ｎ＝１１）＜１０％。方法简单，灵敏、快速，并用于高纯氧化铥提取工艺流程分析的５Ｎ～６Ｎ的产品检验。
In this paper, a method for the direct determination of 14 trace rare earth impurities in 5N ~ 6N high purity magnesia by ICP-MS internal compensation and correction method was studied. The spectral interference and matrix effect determined by ICP-MS were studied. The effects of Rh, Ga, In, Cs as compensation and correction of internal standard elements were investigated. In effect, the internal standard of In was used to effectively eliminate the matrix effect of chromium oxide (g / L). Standard recovery of 92 ~ 106%, RSD (n = 11) <10%. The method is simple, sensitive and rapid, and is applied to the product inspection of 5N ~ 6N for the analysis of the extraction process of high-purity chrysene oxide.