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This paper presents a MEMS gyroscope control system of using a high-order band-pass continuoustime sigma-delta modulator.Compared with a low-pass discrete-time sigma-delta modulator based solution,the band-pass modulator can considerably decrease the sampling frequency;moreover,the continuous-time architecture has an obvious advantage on PCB prototyping and shorter lead time of the implementation in hardware.System level simulations using MATLAB/Simulink show the proposed sixth order sigma-delta modulator can achieve a high SNR of 100 dB for an angular rate input with an amplitude of 200/s and a frequency of32 Hz.A PCB circuit implementation is simulated using Orcad/PSpice to analyze the stability,and implemented in hardware.Measurement of the power spectral density of the output bitstream reveals a noise floor of90 dBV/Hz1/2.The prototype is tested on a rate table with an angular rate input,verifying that the principle of the approach of using an electro-mechanical band-pass sigma-delta modulator control system for a MEMS gyroscope.
This paper presents a MEMS gyroscope control system of using a high-order band-pass continuoustime sigma-delta modulator. Compared with a low-pass discrete-time sigma-delta modulator based solution, the band-pass modulator can smooth decrease the sampling frequency ; moreover, the continuous-time architecture has an obvious advantage on PCB prototyping and shorter lead time of the implementation in hardware. System level simulations using MATLAB / Simulink show the proposed sixth order sigma-delta modulator can achieve a high SNR of 100 dB for an angular rate input with an amplitude of 200 / s and a frequency of 32 Hz. A PCB circuit implementation is simulated using Orcad / PSpice to analyze the stability, and implemented in hardware. Measurement of the power spectral density of the output bitstream reveals a noise floor of 90 dBV / Hz1 / 2. The prototype is tested on a rate table with an angular rate input, verifying that the principle of the approach of using an electro-mechanical band-pass sigma-del ta modulator control system for a MEMS gyroscope.