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在集成微电容式传感器的研究中,由于敏感电容值的变化量非常微小,其接口电路的研究对传感器性能提升是至关重要的。设计了一种基于电流镜原理检测的微电容式传感器接口电路,电路由电容转换电压电路、减法器电路、脉冲电路、缓冲器电路等组成。基于0.18μm CMOS工艺库对电路进行设计仿真,结果表明该电路便于与敏感电容兼容,输出电压与敏感电容成线性关系,其检测精确度高、范围广。
In the research of integrated micro-capacitance sensor, the research of its interface circuit is very important to the improvement of the sensor performance because the change of the value of the sensitive capacitance is very small. A micro-capacitance sensor interface circuit based on the current mirror principle detection is designed. The circuit is composed of a capacitor conversion voltage circuit, a subtractor circuit, a pulse circuit and a buffer circuit. Based on the 0.18μm CMOS technology library, the circuit simulation is carried out. The results show that the circuit is compatible with the sensitive capacitor. The output voltage has a linear relationship with the sensitive capacitance. The detection accuracy is high and the range is wide.