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研究了工作频率和温度对TiO2－K2O－LiZnVO4陶瓷薄膜湿敏元件感湿特性的影响．结果表明：在低湿区，元件的阻抗随频率增大、温度升高而减小，感湿灵敏度随频率增大、温度降低而显著减小，感湿特性曲线出现平台；在高湿区，频率和温度对元件感湿特性的影响可以忽略，感湿特性曲线线性良好．分析了陶瓷薄膜的极化现象，发现极化现象导致薄膜的微观电容在低温低湿时对湿度变化不敏感．据此解释了极化现象引起频率和温度对元件感湿特性影响的内在机理．
The effect of operating frequency and temperature on the humidity sensing characteristics of TiO2-K2O-LiZnVO4 ceramic thin film humidity sensor was studied. The results show that with the increase of frequency and temperature, the impedance of components decreases with the increase of frequency and temperature. The sensitivity of humidity increases with the increase of frequency and temperature, The influence of temperature and humidity on the element wet feeling property is negligible, and the wetness characteristic curve has a good linearity. The polarization phenomenon of the ceramic thin film was analyzed and it was found that the polarization phenomenon caused the microcosmic capacitance of the film to be insensitive to the humidity change at low temperature and low humidity. Based on this, the intrinsic mechanism of the influence of frequency and temperature on the element wet-sensing properties is explained.