大规模集成电路(LSI)作为工业界不可缺少的重要基础材料正在不断地发展着。人们渴望在扩大需求量的同时能进一步实现器件的高性能化。并试图通过器件微细化来谋求提高集成度及其特性。这是迄今IC技术人员一味追求的途径,也是今后应继续探索的一个课题。然而器件的微细化使制造工艺的难度越来越大。例如目 Large-scale integrated circuit (LSI) is an indispensable industry as an important basic material is constantly evolving. People are eager to further increase the performance of their devices while expanding their demand. Attempts to improve the level of integration and its characteristics through the miniaturization of devices. This is by far the only way for IC technicians to pursue, and it is also a topic that should be explored in the future. However, the miniaturization of the device makes the manufacturing process more and more difficult. For example, head