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光栅复制是降低光栅制造成本,提高产量的一条有效途径。研究了利用紫外压印技术复制微结构光栅的方法。使用玻璃基底矩形浮雕结构的微结构光栅作为母光栅,给出了利用聚二甲基硅氧烷(PDMS)制作光栅模具和在光敏聚合物材料上复制微结构光栅的详细过程。经过优化工艺条件,成功地复制了一系列不同周期和开口比的微结构光栅,测试了复制光栅和母光栅的衍射图像和0级与±1级的衍射强度,结果表明,复制光栅和母光栅的衍射图像与光强分布基本一致。
Raster copy is to reduce the grating manufacturing costs, increase production is an effective way. The method of replicating microstructured grating by UV imprinting technique was studied. The detailed process of fabricating a grating mold with polydimethylsiloxane (PDMS) and copying a microstructure grating onto a photopolymer material is given using a microstructure grating of a glass substrate rectangular relief structure as a primary grating. After optimized process conditions, a series of microstructured gratings with different periods and aperture ratios were successfully duplicated. The diffraction images of gratings and gratings and the diffraction intensities of graded 0 and ± 1 were tested. The results show that both gratings and gratings The diffraction image is basically the same with the light intensity distribution.