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利用电弧离子镀技术在不锈钢衬底上沉积了ＴｉＮ，ＴｉＡｌＮ薄膜，并对两种样品分别在大气环境下进行了高温退火．退火前后都做了Ｘ射线衍射（ＸＲＤ）谱及硬度测量，发现退火后ＴｉＡｌＮ薄膜表面出现Ａｌ２Ｏ３层，该层的出现使ＴｉＡｌＮ薄膜的高温特性大大好于ＴｉＮ涂层，在机械工业中将会有广泛的应用前景．
The TiN and TiAlN films were deposited on the stainless steel substrate by arc ion plating, and the two samples were annealed at atmospheric temperature respectively. The results of X-ray diffraction (XRD) and hardness measurement before and after annealing show that there is Al2O3 layer on the surface of TiAlN film after annealing. The appearance of TiAlN film is much better than that of TiN coating in the mechanical industry A wide range of applications.