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通过二维隔振系统的力学分析 ,得到关于质量、刚度、阻尼比三方面结论 ,指导多自由度隔振系统的设计 ,设计出了纳米级微动试验台的隔振系统。仿真实验表明 ,该系统具有良好的隔振效果。此隔振设计方法对超精密机床、超微定位机构等超低传递率隔振设计有一定的参考价值
Through the mechanical analysis of the two-dimensional vibration isolation system, the conclusions about the quality, stiffness and damping ratio are obtained, the design of the multi-freedom vibration isolation system is guided, and the vibration isolation system of the nano-scale micro-vibration test bed is designed. Simulation results show that the system has a good vibration isolation effect. The vibration isolation design method for ultra-precision machine tools, ultra-micro-positioning mechanism and other ultra-low transmission rate vibration isolation design has some reference value