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采用交替溅射方法制备了Ni_Zn铁氧体薄膜 ,并研究了薄膜成分和制备条件例如热处理温度、氧分压、膜厚、衬底层等因素对Ni_Zn铁氧体薄膜的影响 .实验表明沉积态薄膜为非晶态 ,经大气中不同温度热处理后得到了尖晶石结构 ,其主峰为 (311)峰 .另外 ,通过不同条件对Ni_Zn铁氧体薄膜的研究 ,找到了合适的Ni_Zn铁氧体薄膜的制备条件
Ni_Zn ferrite thin films were prepared by the alternate sputtering method and the effects of the composition and preparation conditions of the films on the Ni_Zn ferrite thin films were studied.The results show that the deposited thin films Was amorphous, and the spinel structure was obtained by heat treatment at different temperatures in the atmosphere with the main peak of (311) .In addition, the Ni_Zn ferrite thin film was found through the research of Ni_Zn ferrite thin films under different conditions Preparation conditions