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本文提出了一种新型的真空检漏仪器——氮光谱检漏仪的实验结果。它利用检测潘宁放电光谱作为一种快速诊断真空系统质量及检漏的手段。在10~(-4)托压强下,实验测量并比较了各种气体的放电光谱。在可见光区域,氮存在三条强的光谱线。计算表明它们分别是氮离子中的电子从上能级V＇=0到下能级V″=0,1,2的跃迁光谱线。选择4278埃的氮光谱线作工作光谱线,测得了各种条件下油扩散泵系统中氮光电流及总光电流的比值。在现有条件下以氧作为检漏探索气体时,该检漏仪最小可检漏率≤2.8×10~(-7)托·升/秒,响应时间为4秒。
This paper presents a new type of vacuum leak detector - nitrogen spectrometer leak test results. It uses detection of Penning’s discharge spectrum as a means to quickly diagnose vacuum system quality and leak detection. Under 10 ~ (-4) Torr pressure, the discharge spectra of various gases were experimentally measured and compared. There are three strong spectral lines of nitrogen in the visible region. Calculations show that they are the transition spectral lines of the electrons in the nitrogen ion from the upper level V ’= 0 to the lower level V "= 0,1,2, respectively.The nitrogen spectral line of 4278 angstroms is selected as the working spectral line, Under different conditions, the ratio of nitrogen photocurrent to total photocurrent in the oil diffusion pump system.Under the condition of using oxygen as the leak detection gas, the minimum leak rate of the leak detector≤2.8 × 10 ~ (-7) Torr / second, response time of 4 seconds.