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对几种纳米技术进行了综述。纳米计量仪器由三大部分组成：位移系统、计量系统和探测系统，文中论述了这三个部分的现状及发展趋势。最后介绍了计量院的计量型原子力显微镜及兼容型扫描探针显微镜的特点和技术指标，并给出了测量实例。
Several types of nanotechnology were reviewed. Nano-meter consists of three parts: the displacement system, measurement system and detection system, the paper discusses the status of these three parts and development trends. Finally, the metrology institute’s metrology atomic force microscope and compatible scanning probe microscope’s characteristics and technical indicators are introduced, and the measurement examples are given.