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对激光实现由线偏振光转变成圆偏振光的偏振态调制,需要引入90°或270°相位延迟器。设计中选择金属介质组合,光学性能优良的Ag膜作为金属层,利用Gires-Tournois(G-T)腔调节相位,通过优化介质膜堆,在45°入射角和1000~1100 nm波段,所得相位延迟为270°±1°。通过误差分析可知,在现有膜厚控制精度下,控制敏感层容差,在设计带宽内可得到反射率R≥99.9%和相位延迟偏差δ<7.2°。
For the laser to achieve the polarization state modulation from linearly polarized light to circularly polarized light, it is necessary to introduce a 90 ° or 270 ° phase retarder. In the design, a metal medium combination and an Ag film with excellent optical properties were selected as the metal layer. The Gires-Tournois (GT) cavity was used to adjust the phase. By optimizing the dielectric stack at 45 ° incident angle and 1000-1100 nm, the obtained phase retardation was 270 ° ± 1 °. Through the error analysis, it can be seen that under the control accuracy of the existing film thickness, the tolerance of the sensitive layer is controlled, and the reflectance R≥99.9% and the phase delay deviation δ <7.2 ° can be obtained within the designed bandwidth.