一、前言 表面分析技术是随着表面科学的发展在七十年代迅速发展起来的先进显微分析方法。因为它们当中的许多方法同传统的电子显微分析法和X射线分析法相比较,具有更独特和更适于直接观察样品的特点,所以它的应用范围就远远地超出了表面科学领域,不但在物理、化学等自然科学领 I. Introduction Surface analysis technology is an advanced method of microscopic analysis developed rapidly with the development of surface science in the seventies. Because many of these methods are more unique and more suitable for direct observation of samples than traditional electron microscopy and X-ray analysis, their scope of application goes far beyond the field of surface science, not only In physics, chemistry and other natural sciences