The grain size and surface morphology of sputtered Au films are studied by x-ray diffraction and atomic force microscope.For as-deposited samples the grain growth mechanism is consistent with the two-dimensional(2D) theory, which gives relatively low diffusion coefficient during deposition.The annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role.The surface roughness increases with the increase of grain size. The grain size and surface morphology of sputtered Au films were studied by x-ray diffraction and atomic force microscope. For as-deposited samples the grain growth mechanism is consistent with the two-dimensional (2D) theory, which gives relatively low diffusion coefficient during deposition. annealing process demonstrates the secondary grain growth mechanism in which the thickness dependence of grain boundary energy plays a key role. the surface roughness increases with the increase of grain size.