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极坐标激光直写法是制作二元光学器件较有前途的方法:它对直写设备中的转台测控系统提出了许多特殊要求。本文介绍了一种满足这些要求的新型转台测控系统,它在工作过程中相当于上位机与转台之间的智能外围接口。系统以MCS-51微处理机为核心,采用IEEE-488协议实现与上位机的通讯;能够根据上位机的要求,综合运用比例积分与测速微分反馈原理控制转台转速;以硬件为核心构成的模块,实现了曝光圈数控制及高精度测速。
Polar-coordinate laser direct writing is a promising method for fabricating binary optics: it presents many special requirements for turntable measurement and control systems in direct write devices. This paper presents a new turntable to meet these requirements monitoring and control system, which in the course of its work is equivalent to the host computer and the turntable between the intelligent peripheral interface. System with MCS-51 microprocessor as the core, the use of IEEE-488 protocol to achieve communication with the host computer; can be based on the requirements of the PC, the integrated use of proportional integral and velocity feedback differential feedback control turntable speed; hardware as the core module , To achieve the number of exposure control and high-precision speed measurement.