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通过分析2μm波长的差分吸收雷达(DIAL)用于测量大气气象参数和 CO_2分布等测量对激光探测器的技术要求,介绍了相应的2μm波长光电二极管探测器的技术指标。根据该指标进行了器件的材料、材料结构和器件结构设计。其外延材料采用了 In_(1-x)Ga_xAs_yP_(1-y)系列结构。为了减小暗电流和噪声,器件结构借用InGaAs 雪崩管的分离吸收区和倍增区结构,把 PN 结放在具有宽带隙的 InAs_(1-y)P_y 中,光吸收在窄带隙的In_(1-x)Ga_xAs 中。最后,简略介绍了该器件的制备工艺和技术。
The technical specifications of the 2 μm wavelength photodiode detector are introduced by analyzing the technical requirements of the 2 μm wavelength differential absorption radar (DIAL) for the measurement of atmospheric meteorological parameters and CO 2 distribution. According to the index, the device material, material structure and device structure design were carried out. Its epitaxial material adopts In_ (1-x) Ga_xAs_yP_ (1-y) series structure. In order to reduce the dark current and noise, the structure of the device borrows the separate absorption region and the multiplication region structure of the InGaAs avalanche tube. The PN junction is placed in the InAs_ (1-y) P_y with a wide bandgap and the light is absorbed in the narrow bandgap In_ (1 -x) Ga_xAs. Finally, a brief introduction of the device preparation technology and technology.