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室温下,将能量为250 keV He+离子注入z切钽酸锂单晶,注量范围为5.0×1014～5.0×1016He+/cm2,应用三维轮廓仪、X射线衍射(XRD)、紫外可见(UV-Vis)光学吸收谱对未注入和注入样品进行了表征和分析。分析结果表明,在注量达到5.0×1016He+/cm2时,样品表面出现大量凸起条纹,同时晶格沿着[001]方向出现明显肿胀,吸收边则表现出明显的注量相关性。注入样品在空气中放置60 d后,最高注量的样品表面原来凸起的条纹变为细长的裂纹,晶格应变及光学吸收边均出现较大的恢复。讨论了样品表面形貌、晶格应变和光学吸收边与He行为的关系。
At room temperature, a z-cut lithium tantalate single crystal with energy of 250 keV He + ions was implanted in the range of 5.0 × 1014 ~ 5.0 × 1016He + / cm2 with three-dimensional profiler, X-ray diffraction (XRD) and UV- Vis) optical absorption spectra were not injected and injected samples were characterized and analyzed. The results show that when the fluence reaches 5.0 × 10 16 He / cm 2, a large number of convex stripes appear on the surface of the sample, and the crystal lattice swells obviously in the direction of [001], while the absorption edge shows a significant fluence correlation. After the sample was placed in the air for 60 days, the protuberant stripes on the surface of the sample with the highest fluence changed into slender cracks, and the lattice strain and the optical absorption edge both showed a greater recovery. The relationship between surface morphology, lattice strain and optical absorption edge and He behavior was discussed.