校准用压电式高频振动台的频率一般从2到50千赫,振幅不超过0.2微米。为了提高测振幅的精度,我们以相位细分法(又称内插示波管法)为基础,在激光干涉系统的参考镜上施加三角波形振动,对被测振动进行相位调制,用多周期平均法进行测定,取得了满意结果。这个 The frequency of the piezoelectric pendulum for calibration is generally from 2 to 50 kHz and the amplitude does not exceed 0.2 μm. In order to improve the accuracy of amplitude measurement, we use the phase subdivision method (also called interpolation oscilloscope method) as the basis, and apply triangular waveform vibration to the reference mirror of the laser interferometer system to phase-modulate the measured vibration, Average method was measured, and achieved satisfactory results. This one