利用ＫｒＦ超短脉冲激光器（２４８ｎｍ，５００ｆｓ，１０ｍＪ）开展了超短脉冲激光淀积类金刚石薄膜的实验研究，薄膜生长速率０．０２ｎｍ／ｐｕｌｓｅ，厚度０．５～０．６μｍ，显微硬度５５ＧＰａ，光学透过率优于９０％（５８０～２０μｍ）。采用等离子体的时间－空间分辨的发射光谱技术，给出了等离子体的粒子成份以及等离子体的时间－空间的演化图像，以及在不同激光参数条件下等离子体特性的变化，发现超短脉冲激光的等离子体有能量高、持续时间短（高通量）的特点，适合类金刚石薄膜的淀积并有制备其他非晶态结构和纳米相薄膜材料的潜力。利用自行研制的离子探针原位诊断了在成膜条件下的粒子流的特性及其随激光参数等实验条件的变化，其结果与发射光谱非常自洽。比较了不同激光参数条件下，等离子体特性、粒子流特性及淀积类金刚石薄膜的结构和性能的变化，并对短脉冲激光和靶相互作用过程和激光等离子体淀积类金刚石成膜的机理进行了讨论，为进一步提高成膜质量走向实用化打下基础。 Ultrashort pulsed laser deposition of diamond-like carbon films was carried out using KrF ultrashort pulse laser (248nm, 500fs, 10mJ). The film growth rate was 0.02nm / pulse, the thickness was 0.5 ~ 0.6μm and the microhardness was 55GPa , The optical transmittance is better than 90% (580 ~ 20μm). Using plasma time-space-resolved emission spectroscopy, the particle composition of plasmas and the time-space evolution of plasmas and plasma properties under different laser parameters were obtained. It was found that ultrashort pulse laser Plasma has the characteristics of high energy and short duration (high flux), which is suitable for the deposition of DLC films and has the potential of preparing other amorphous structures and nano-phase thin film materials. The self-developed ion probe was used to diagnose the characteristics of particle flow under film-forming conditions and its changes with experimental conditions such as laser parameters. The results are in good agreement with the emission spectra. Plasma properties, particle flow characteristics and the structure and properties of the deposited diamond-like carbon films were compared under different laser parameters. The mechanism of laser-target-interaction and laser-induced deposition of diamond-like carbon films Discussed, in order to further improve the quality of the film to lay the foundation for practical.