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简要叙述了小孔流量法测量材料出气率实验的原理和实验装置,给出了不锈钢溅射镀TiN膜在不同情况下的热出气率,并对影响不锈钢溅射镀TiN膜热出气率情况的各种因素进行了分析,为使用溅射镀TiN膜表面处理的储存环真空室的设计提供了依据。
A brief introduction of the principle and experimental device of the orifice flow method for measuring the gas outflow rate of the material is given. The hot outgassing rate of the stainless steel sputtered TiN film under different conditions is given. The influence of the hot outgassing rate on the TiN film thickness Various factors were analyzed for the use of sputtering TiN film surface treatment storage ring vacuum chamber provides the basis for the design.