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本文介绍了一台用于评价光盘和盘基表面缺陷特性的自动测试仪器。仪器采用伺服聚焦的激光束扫描高速转动的光盘或光盘基片表面,探测出其表面缺陷。利用电子技术对缺陷信号进行快速分类和统计。综合应用光学、机械、电子技术和计算机等方面技术,实现了(?)89mm～(?)130mm 光盘和光盘基片的自动测量和评价。仪器可测量光盘和基片的表面麻点、划痕、沾污、膜层针孔等缺陷,测试缺陷尺寸范围为0.3～180μm,测定平均缺陷密度值D_u,范围为10~(-2)～10~(-7),重复统计测量误差小于10%。
This article describes an automatic test instrument for evaluating the defect characteristics of discs and disc-based surfaces. The instrument uses a servo-focused laser beam to scan the surface of a high-speed rotating disc or disc substrate to detect surface defects. Using electronic technology for rapid classification and statistics of defects. Comprehensive application of optical, mechanical, electronic technology and computer technology to achieve (?) 89mm ~ (?) 130mm optical disc and optical disc substrate automatic measurement and evaluation. The instrument can measure the pitting, scratches, stains, pinhole and other defects on the surface of the disc and the substrate, the test defect size range of 0.3 ~ 180μm, the average defect density value D_u, the range of 10 ~ (-2) ~ 10 ~ (-7), repeated statistical measurement error less than 10%.