综述了近年来物理气相沉积TiN多元涂层和多层涂层的研究 ,并指出通过合理的多元和多层涂层设计 ,TiN多元涂层和多层涂层能克服单一TiN涂层的不足 ,综合不同组元和不同单层的优势 ,从而获得优良的结合强度、硬度、耐磨性和高温性能 ,是今后物理气相沉积技术极有潜力的发展方向之一 In this paper, the research on TiN multi-layer coating and multi-layer coating by physical vapor deposition in recent years is reviewed. It is pointed out that TiN multi-layer coating and multi-layer coating can overcome the deficiency of single TiN coating through reasonable multi-layer and multi-layer coating design. Combining the advantages of different elements and different monolayers in order to obtain excellent bond strength, hardness, wear resistance and high temperature performance is one of the most potential development directions of physical vapor deposition technology in the future