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类金刚石膜是一种非晶结构的薄膜。关于其原子排列结构仍是目前研究的主要方向。本文从实验研究和理论研究两方面综合介绍类金刚石膜的研究概况,并介绍了类金刚石膜的实验研究方法和理论模型。
Diamond-like carbon film is a non-crystalline structure of the film. About its atomic arrangement structure is still the main direction of current research. In this paper, the research status of diamond-like carbon films is introduced from both experimental and theoretical aspects. The experimental research methods and theoretical models of diamond-like carbon films are also introduced.