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多平面冷反光镜模具质量的好坏直接影响着出射光束照度的均匀度和出射光束的定向性,目前使用的检测方法存在测量过程繁琐费时,测量精度低等缺点。本文介绍了一种利用CCD线阵光电探测器研制的多面体模具角参数自动测量系统。该装置采用光学方法,将待测的几何参数——两相邻平面间夹角α转化为测量该两平面反射光聚焦光斑的距离,然后用CCD图像数据采集系统处理数据。使整个系统简单、紧凑,适用范围广,对不能接触测量或因面形太小或因形状复杂而难以测量的平面夹角均可进行测量。本文亦讨论了实验数据处理,并根据实际情况,采用重心法计算光斑中心位置,使测量精度有了很大提高。最后给出了利用该系统测量的结果。
The quality of the multi-plane cold mirror mold directly affects the uniformity of the illuminance of the outgoing beam and the directivity of the outgoing beam. The detection method currently used has the disadvantages of cumbersome and time-consuming measurement processes and low measurement accuracy. In this paper, an automatic measurement system of polygon angle parameters developed by CCD linear array detector is introduced. The device adopts the optical method to convert the geometric parameter to be measured - the angle α between two adjacent planes into the distance for measuring the focused spot of the two plane reflected light, and then processes the data with a CCD image data acquisition system. The whole system is simple, compact, wide range of applications, can not touch the measurement or because the shape is too small or because of complex shape and difficult to measure the plane angle can be measured. This article also discusses the experimental data processing, and according to the actual situation, using the center of gravity method to calculate the spot center position, the measurement accuracy has been greatly improved. Finally, the results of the system measurement are given.