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报道了采用集成技术制备的差分对结构pH-ISFTET传感器及其特性,实验结果表明,ISFET器件性能良好,经差分放大器输出可以改善恒流电路测量的响应特性,且有效地抑制温漂、时漂等不稳定因素。采用金膜辅助电极替代甘汞参考电极的差分测量仍有较好的结果。
The differential-pair pH-ISFTET sensor fabricated by the integrated technology and its characteristics are reported. The experimental results show that the ISFET device has good performance. The output of the differential amplifier can improve the response characteristics of the constant current circuit measurement and effectively suppress the temperature drift, Other unstable factors. Difference measurements using a gold film auxiliary electrode instead of calomel reference electrode still have good results.