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采用溶胶-凝胶法(sol-gel)在Si基SiO2衬底上制备了SiO2-TiO2芯层薄膜,构成了以SiO2为下包层,空气为上包层的平面光波导。利用光纤激光器对平面波导的芯层进行直写,结合后续的化学腐蚀工艺得到了SiO2-TiO2条形光波导,并着重研究了激光直写波导过程中存在的功率密度阈值以及阈值随薄膜预热处理温度的变化关系。研究结果表明,激光直写SiO2-TiO2波导存在起始收缩阈值和烧蚀损伤阈值;随着薄膜热处理温度的提高,两个阈值同时增大,其中损伤阈值的增大趋势要大于收缩阈值;因而薄膜可承受的直写光斑直径变小,所得波导宽度显著减小。最后对直写制得条形光波导的导光性能作了测试分析,验证了波导的三维导光性。
A SiO2-TiO2 core film was prepared on a Si-based SiO2 substrate by sol-gel method, and a planar waveguide with SiO2 as the cladding and air as the cladding was fabricated. The optical fiber laser is used to directly write the core of the planar waveguide and the subsequent chemical etching process is used to obtain the SiO2-TiO2 optical waveguide. The power density threshold and the threshold value of the waveguide in the direct write waveguide are studied emphatically. Process temperature changes. The results show that laser direct write SiO2-TiO2 waveguide has initial shrinkage threshold and ablation damage threshold. With the increase of the heat treatment temperature, the two thresholds increase at the same time, and the damage threshold increases more than the shrinkage threshold. The write-resist spot diameter that the film can withstand becomes smaller, and the resulting waveguide width is significantly reduced. Finally, the light guide performance of the straight optical waveguide was tested and analyzed, which verified the three-dimensional optical waveguide.