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在《超精密切削磨削和蚀除加工》一文(见本刊1985年第6期)中,已就超精密加工的定义、方法和特点进行过论述,现对它的加工系统与加工准则进行探讨。一、加工系统 1.设备与工艺装备超精密加工,不论切削、磨削或蚀除,在设备上除有特殊部分外(如离子束加工,要有离子源和真空系统),都要有机床本体,以安装工件和工具以及传递运动等,因此对超精密加工机床的一般要求如下。
In the article “Ultraprecision Machining and Etch Processing” (No. 6, 1985), the definition, method and characteristics of ultraprecision machining have been discussed, and its processing system and machining guidelines Discussion. First, the processing system 1. Equipment and process equipment Ultra-precision machining, regardless of cutting, grinding or erosion, in addition to a special part of the device (such as ion beam processing, to have the ion source and the vacuum system), have a machine Body, to install the workpiece and tools and transfer movement, so the general requirements for ultra-precision machining machine is as follows.