一、概述在煤矿开采过程中常常伴随有瓦斯产生,由于它具有爆炸和燃烧的特性,因而严重威胁着煤矿安全生产和井下工人的生命安全。为了保证煤矿生产的安全,需要对矿井中的甲烷(瓦斯)进行检测,以便掌握甲烷气体在矿井中的含量,如果超过规定的界限,就要采取必要的措施,从而达到安全生产的目的。我们研制成功的热导式甲烷浓度传感器,是利用 SiC 单晶热敏电阻实现甲烷浓度检测的热导式检测器件。该传感器的技术指 I. Overview In coal mining process is often accompanied by gas production, because of its explosive and burning characteristics, which is a serious threat to coal mine safety production and life safety of underground workers. In order to ensure the safety of coal production, the methane (gas) in the mine needs to be tested in order to know the content of methane gas in the mine. If the limit is exceeded, the necessary measures should be taken to achieve the goal of safe production. We developed a successful thermal conductivity of methane concentration sensor, the use of SiC single crystal thermistor methane concentration detection of the thermal conductivity detection device. The sensor’s technical means