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利用带折射修正的布喇格衍射定律和薄膜光学理论分析了低角Ｘ射线衍射谱中出现的一系列现象，导出了多层膜周期厚度和周期中不同材料间的配比率的计算公式，对多层膜的低角Ｘ射线衍射谱中主峰间的次峰现象作出了解释，并对低角Ｘ射线衍射测量单层膜厚度进行分析，给出了精确的测厚公式。
A series of phenomena in the low-angle X-ray diffraction spectrum were analyzed by using the Bragg’s law of diffraction with refraction correction and the theory of thin-film optics, and the formula for calculating the ratio of the periodic thicknesses and periods of the multilayer films was derived. The second peak phenomenon in the low-angle X-ray diffraction spectrum of the multi-layer film was explained, and the thickness of the monolayer film measured by low angle X-ray diffraction was analyzed. The exact thickness measurement formula was given.