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脉冲激光沉积法是一种制备类金刚石膜(DLC膜)的新技术。总结了脉冲激光法制备DLC膜在激光源、脉宽、沉积气氛及薄膜掺杂等方面的发展趋势。建立了飞秒脉冲激光沉积DLC膜系统,在不同的沉积条件下(如:真空、氧气氛、掺硅等)开展了实验研究,阐明了不同沉积条件对DLC膜性能的影响规律。在硅、锗红外窗口上镀制了工程实用的DLC增透保护膜,平均透过率超过90%,纳米硬度高达44 GPa,镀膜窗口通过了军标的盐雾、重摩擦等试验,满足海面等恶劣环境使用要求。
Pulsed laser deposition is a new technique for preparing diamond-like carbon films (DLC films). The development trend of DLC film prepared by pulsed laser method in laser source, pulse width, depositional atmosphere and thin film doping is summarized. The femtosecond pulsed laser deposition DLC film system was established, and the experimental research was carried out under different deposition conditions (such as vacuum, oxygen atmosphere, silicon doping) to clarify the influence of different deposition conditions on the performance of DLC films. Engineering DLC antireflective coating has been coated on silicon and germanium infrared windows with average transmittance over 90% and nano hardness up to 44 GPa. The coating window passed military tests such as salt spray and heavy rubbing to meet the requirements of the sea Harsh environment requirements.