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对纳米晶SiC薄膜进行了P和B的掺杂 ,B掺杂效率比P高 ,其暗电导预前因子与激活能遵守Meyer Neldel规则 ,并有反转Meyer Neldel规则出现 .掺杂效率比非晶态碳化硅薄膜高是纳米碳化硅薄膜的特点之一 .非晶态中的隧穿和边界透射对输运有一定贡献 .
The doping of P and B was carried out on the nanocrystalline SiC films, the doping efficiency of B was higher than that of P, and the dark conductance preconditioner and activation energy obey the Meyer Neldel rule, and the reversal Meyer Neldel rule appeared. Crystalline silicon carbide thin film is one of the characteristics of the nano-silicon carbide film in the amorphous state of the tunneling and the boundary of the transmission has a certain contribution to transport.