论文部分内容阅读
提出了一种结构简单、易于加工的阀片式硅微流量传感器。该微流量传感器通过阀片将流量转换为梁表面弯曲应力，再由集成在阀片上的压敏电阻桥检测出流量信号。该传感器采用硅微细加工工艺制作，直接在单晶硅上加工出阀片和压敏电阻桥。该微流量传感器芯片尺寸３ ．５×３．５（ｍ ｍ） ，封装后的外形尺寸为Φ１０×４（ｍ ｍ） ；在１０ ～２００ｍｌ／ｍｉｎ 的气流量下，线性度优于５ ％ ．
Proposed a simple structure, easy to process valve chip silicon micro-flow sensor. The micro-flow sensor through the valve to the flow rate converted to beam surface bending stress, and then integrated by the varistor bridge on the valve to detect the flow signal. The sensor uses silicon microfabrication process, directly on the single-crystal silicon valve and varistor bridge processing. The micro-flow sensor chip size 3. 5 × 3.5 (m m). The dimensions of the package are Φ10 × 4 (m m). The linearity is better than 5% at a gas flow rate of 10 ~ 200ml / min.