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在现代工业中,对气体和空气的流量计量要求愈来愈高,虽然已有许多计量流量的方法,但都存在着不同程度的缺陷。本文介绍了一种新型工业用流量传感器——流体振动流量传感器,它利用了流体振动原理和硅片流量传感技术,并结合了文丘里管设计原理和数字电子信号处理技术。具有测量范围大、准确度高、复现性和稳定性好、结构紧凑、生产成本低、液体单元的单体设计可与各种型号文丘里喷嘴配套使用等优点。对样机流量传感器的测试结果表明,该流量传感器完全适用于工业生产中的过程监测和流量计量,具有广阔的应用前景。
In the modern industry, gas and air flow metering requirements are getting higher and higher. Although there are many ways to measure the flow rate, they all have different degrees of defects. This paper presents a new type of industrial flow sensor, the Fluid Vibration Flow Sensor, which utilizes the principle of fluid vibrations and silicon flow sensing technology. It combines the design principles of Venturi tubes with digital electronic signal processing. Has the advantages of large measuring range, high accuracy, good reproducibility and stability, compact structure, low production cost, single unit design of liquid unit can be used with various types of Venturi nozzles. The test results of the prototype flow sensor show that the flow sensor is fully suitable for process monitoring and flow measurement in industrial production, and has broad application prospects.