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本文利用石英晶体的共振频率随晶片附着物质量的变化而变化的原理 ,采用频差检测方法 ,将压电石英晶体作为质量传感器 ,设计出了测定物质质量微弱变化的检测系统 ,并成功地应用于金溶胶在石英晶体电极上沉积过程的在线测量中
Based on the principle that the resonant frequency of quartz crystal changes with the mass of wafer attachment, this paper adopts frequency deviation detection method and piezoelectric quartz crystal as mass sensor to design a detection system to measure the weak change of mass. On-line measurement of deposition of gold sol on quartz crystal electrodes