本文较全面地讨论了近几年来国外有关利用扫描探针显微镜进行纳米尺度表面改性和微细加工工作的现状和发展，重点讨论纳米尺寸光刻制板技术的发展．最后，本文简要介绍本课题组利用扫描隧道显微镜进行纳米尺度曝光的有关工作，希望引起更多科技工作者的重视，以便进一步推进我国在纳米技术领域的发展． In this paper, the status quo and development of nano-scale surface modification and micro-fabrication using scanning probe microscope in foreign countries in recent years are discussed comprehensively, with emphasis on the development of nano-scale lithography plate technology. Finally, this article briefly introduces the work of our group on the use of scanning tunneling microscopy for nanoscale exposures, hoping to attract more attention of scientists and technologists in order to further promote China’s development in the field of nanotechnology.