For the chip integration of MEMS(micro-electromechanical system) safety and arming device, a miniature detonator needs to be developed to reduce the weight and volume of explosive train. A Si-based micro-detonator is designed and fabricated, which meets the requirement of MEMS safety and arming device. The firing sensitivity of micro-detonator is tested according to GJB/z377A-94 sensitivity test methods:Langlie. The function time of micro-detonator is measured using wire probe and photoelectric transducer. The result shows the average firing voltage is 6.4 V when the discharge capacitance of firing electro-circuit is 33 mF. And the average function time is 5.48 ms. The firing energy actually utilized by Si-based micro-detonator is explored. For the chip integration of MEMS (micro-electromechanical system) safety and arming device, a miniature detonator needs to be developed to reduce the weight and volume of explosive train. A Si-based micro-detonator is designed and fabricated, which meets the requirement of MEMS safety and arming device. The firing sensitivity of micro-detonator is tested according to GJB / z377A-94 sensitivity test methods: Langlie. The function time of micro-detonator is measured using wire probe and photoelectric transducer. The firing energy is 6.4 V when the firing capacitance of the firing electro-circuit is 33 mF. And the average function time is 5.48 ms. The firing energy actually utilized by Si-based micro-detonator is explored.