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用照像、制版和腐蚀的方法制造一种三极板单片式电容传感器 ,用于在介质薄膜的生产线上动态测厚。由于这种新型传感器可以沿导轨在水平方向上往复位移 ,所以在被测薄膜的幅宽方向上可以实现多点巡回检测。用这种传感器研制的全电子式克重计使用了虚拟仪器平台 ,利用图形化语言和若干个软件包 ,在计算机上强化了仪器的动态自校零功能 ,改善了整机非线性特性 ,简化了底层软件开发过程。
A three-plate, monolithic capacitive sensor is fabricated using photographic, plate-making and etching methods for dynamic thickness measurement in the production of dielectric films. Due to the new sensor can be reciprocating along the rail in the horizontal direction, so the measured film width direction can achieve multi-point tour detection. The electronic gravimeter developed with this sensor uses a virtual instrument platform, using graphical language and several software packages, to strengthen the instrument’s dynamic self-zeroing function on the computer, to improve the non-linear characteristic of the whole machine and to simplify The underlying software development process.