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讨论了俄歇能谱仪分析壁垒型铝阳极氧化膜成份的一些技术问题。配合氩离子溅射深度成份分析、离子注入标记氙原子、膜剖面超薄切片的透射电子显微镜观察,证实了壁垒型阳极氧化膜一般由内、外两层组成。外层是向膜外迁移的铝离子在膜与电解质溶液的界面上形成的;内层则是向膜内迁移的含氧离子在膜与基体界面上形成的。电解质溶液的离子会结合在膜中,并在电场影响下发生漂移。测出了存选定的实验条件下,膜中电解质离子的平均漂移速度。
The technical problems of analyzing the composition of barrier aluminum anodic oxide film by Auger spectrometer are discussed. Combined with the analysis of the depth of argon ion sputtering, the ion-implanted xenon atoms and the ultra-thin section of the film were observed by transmission electron microscope. The results showed that the barrier-type anodic oxide film was composed of inner and outer layers. The outer layer is formed by the aluminum ions migrating to the outside of the membrane at the interface between the membrane and the electrolyte solution. The inner layer is formed by the oxygen ions migrating into the membrane at the interface between the membrane and the substrate. Electrolyte solution ions will be combined in the membrane, and drift under the influence of the electric field. The mean drift speed of the electrolyte ions in the membrane under the selected experimental conditions was measured.