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为了提高金刚石膜的成品率、生长速率和膜的质量，本文建立了直流热阴极辉光ＰＣＶＤ法快速生长高品质金刚石膜的工艺。我们用该方法很容易制备出１ｍｍ以上的金刚石厚膜，热导率达１２Ｗ／ｃｍ·Ｋ以上。制做的拉丝模的使用寿命是国产聚晶拉丝模的５倍以上。该方法制备金刚石膜的装置是在原直流辉光装置上改进而成，装置主要包括：电源、真空获得、进气系统、水冷系统，电极等。阴级用Ｔａ制成，并间接水冷。基片采用Ｍｏ片、Ｓｉ片等。原料气体使用Ｈ２、ＣＨ４、Ｃ２Ｈ５ＯＨ。其中Ｃ２Ｈ５ＯＨ用一路Ｈ２携带。乙醇瓶内气压维持常压，气体流量由质量流量计控制。用该方法制备金刚石膜主要工艺条件由表１给出。表１制备金刚石膜主要工艺条件电流密度０．４～１．０Ａ／ｃｍ２极间电压８００～１０００Ｖ极间距离２～４ｃｍ反应气体压强１．５×１０４～３×１０４ＰａＨ２：ＣＨ４：（Ｃ２Ｈ５ＯＨ＋Ｈ２）１００：（１～５）：（１０～５０）阴极温度１０００～１４００℃基片温度８００～１２００℃从制备的金刚石膜的激光拉曼光谱图上可以看出，拉曼散射峰位的波数为１３３２ｃｍ－１，在１５５０ｃｍ－１和１５８０ｃｍ－１附近几乎没有非晶碳峰和石墨峰，金刚石膜质量优良。实验发现，制备金刚?
In order to improve the yield, growth rate and film quality of the diamond film, a direct current hot cathode glow PCVD method was developed to rapidly grow high quality diamond films. We use this method is easy to prepare more than 1mm thick diamond film, the thermal conductivity of 12W / cm · K or more. Drawing system made of life is the domestic polycrystalline drawing die more than 5 times. The method for preparing the diamond film is improved on the original DC glow device, and the device mainly comprises a power supply, a vacuum obtaining, an air inlet system, a water cooling system, an electrode and the like. Yin made of Ta, and indirectly water-cooled. The substrate using Mo films, Si films. The raw gas used H2, CH4, C2H5OH. Which C2H5OH all the way to carry H2. Ethanol pressure in the bottle to maintain atmospheric pressure, gas flow control by the mass flow meter. The main process conditions for preparing diamond films by this method are given in Table 1. Table 1 Preparation of diamond film The main process conditions Current density 0.4 ~ 1.0A / cm2 The voltage between 800 ~ 1000V The distance between the electrodes 2 ~ 4cm Reaction gas pressure 1.5 × 104 ~ 3 × 104PaH2: CH4: (C2H5OH + H2) 100 : (1 to 5) :( 10 to 50) Cathode temperature 1000 to 1400 ° C Substrate temperature 800 to 1200 ° C From the Raman spectrum of the prepared diamond film, it can be seen that the Raven scattering peak has a wavenumber of 1332 cm -1, there is almost no amorphous carbon peak and graphite peak near 1550 cm-1 and 1580 cm-1, and the diamond film has excellent quality. The experiment found that the preparation of diamond?