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1.序言超高真空密封用的金属空心 O 圈近年来普及很快。因为空心,所以具有压紧力小、弹性大等优点。为提高和凸缘之间的密封性,镀材应比基材的金属软并富有延展性。一般用银作镀材,也可用金、铜、镍、铟等。这些材料对金属空心 O 圈(以下简称 O 圈)的密封特性(压紧力和有效复原量)产生什么影响,在此以前还不十分清楚。为此,对用上述的银、金、铜、镍、铟作镀材的 O 圈作压缩泄漏试验并研究它对密封特性的影响。O 圈的截面直径有:0.9mm,1.6mm,2.4mm,3.2mm。这里报告的是最后三种直径的 O 圈的试验结果。
1. Introduction The hollow metal O-ring for ultra-high vacuum sealing has spread rapidly in recent years. Because of hollow, so with a small pressure, flexibility and so on. To improve the tightness between the flanges, the plating material should be softer and more ductile than the metal of the base material. Generally used for silver plating, but also available gold, copper, nickel, indium and so on. What effect these materials have on the sealing characteristics (pressing force and effective recovery) of a metal hollow O-ring (hereinafter referred to as O-ring) has not been clearly understood here. To this end, the use of the above silver, gold, copper, nickel, indium plating for the O-ring as a compression leak test and study its sealing properties. O ring cross-sectional diameter: 0.9mm, 1.6mm, 2.4mm, 3.2mm. Here is the result of the O-ring test for the last three diameters.