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本文介绍了采用离子交换技术制作表面传导电子发射源的原理和方法,应用离子交换技术制作了发射材料为金属Pd的表面传导电子发射源。分别研究了加电形成工序和激活工序中器件电流、发射电流随器件电压的变化规律,测试了电子发射性能,结果表明:发射电流存在阈值电压,即在器件电流达到最大值时的器件电压;最大发射效率有一个电压区间,在这个电压区间内,器件电流处于最低平台阶段,而发射电流达到稳定高电流阶段。
This paper introduces the principle and method of making surface conduction electron emission source by using ion exchange technology. The surface conduction electron emission source whose emission material is metal Pd is fabricated by ion exchange technology. The changes of device current and emission current with the device voltage in the process of power-on formation and the activation are respectively studied. The electron emission performance is tested. The results show that there is a threshold voltage in the emission current, that is, the device voltage when the device current reaches the maximum value. The maximum emission efficiency has a voltage interval in which the device current is at the lowest plateau and the emission current reaches a steady high current.